1.Based on Nikon LV series with four bright filed objectives:5x, 20x, 50x, 100x.

and USB3.0, CMOS camera

2.Sample x&y: stage travel Max.25mm,   500μm/360°rotation, sensitivity 0.1μm;

rotation angle 0.76°/360°rotation.

Stamp x&y: stage travel Max.13mm,   500μm/360°rotation, sensitivity 0.1μm;

z:stage travel Max. 6mm, 500μm/360°rotation;

tilt& tip (x-&y- axis) and rotation angle :plus/minus 4℃,~0.3°/360°rotation.

3.Substrate is fixated with vacuum and can be heated up to 200℃.

PID Temperature controller : heating   range RT to 200℃.

Vacuum pump with electromagnetic valve switch that on/off the vacuum of the substrate holder.